Etch Rates

Etch rates (Unit = Angstroms/Minute) posted here are estimates intended to provide insight on the etching of various materials.
Actual etch rates will vary depending on material stock used.

MaterialEtch Rate (A/min)
Ag 1050
Al 373
Al 203 48
Au 630
AZ 1350 117
Be 76
Bi 5133
C 64
CdS 1283
Co 262
Cr 309
Cu 513
Fe 204
GaAs (100) 379
GaAs (110) 933
Gap (111) 927
GaPb (111) 1091
Ge 537
Hf 385
InSb 887
Ir 334
LiNb03 227
Mg 131
Mn 507
Mo 239
Mo27 163
Nb 274
Ni 309
Ni80Fe20 292
MaterialEtch Rate (A/min)
NiCr
 309
Os 292
Pb 1517
PbTe 2199
Pd 642
Pt 362
PZT Ceramic 62
Rb2333
Re303
Rh420
Riston 14146
Ru356
Sb1889
Si216
SiC204
Si02192
Sn700
Soda Glass117
Ta245
Ta2O5350
TaC87
TaN233
Ti192
TiOrTiW195
V181
W198
Y554
Zr332